Semiconductor / Solar Systems
Solar energy as a powersource is scaling up. Increased conversion efficiency and cost decline have been the focus to reach economic applications beyond the space industry. Methods using various substrates are applied- they all have to function at the atomic level. To maximize the area efficiency and energy conversion, the control of the precursor layers and other electron processes is pivotal.
For crystalline as well as micro-crystalline deposition, HTR has manufactured media process systems to produce the desired product performance.